JPS61185286U - - Google Patents

Info

Publication number
JPS61185286U
JPS61185286U JP6842385U JP6842385U JPS61185286U JP S61185286 U JPS61185286 U JP S61185286U JP 6842385 U JP6842385 U JP 6842385U JP 6842385 U JP6842385 U JP 6842385U JP S61185286 U JPS61185286 U JP S61185286U
Authority
JP
Japan
Prior art keywords
arranging
mover
polarity
moving direction
permanent magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6842385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6842385U priority Critical patent/JPS61185286U/ja
Publication of JPS61185286U publication Critical patent/JPS61185286U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP6842385U 1985-05-09 1985-05-09 Pending JPS61185286U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6842385U JPS61185286U (en]) 1985-05-09 1985-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6842385U JPS61185286U (en]) 1985-05-09 1985-05-09

Publications (1)

Publication Number Publication Date
JPS61185286U true JPS61185286U (en]) 1986-11-19

Family

ID=30603159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6842385U Pending JPS61185286U (en]) 1985-05-09 1985-05-09

Country Status (1)

Country Link
JP (1) JPS61185286U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12065319B2 (en) 2020-10-29 2024-08-20 Canon Kabushiki Kaisha Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986469A (ja) * 1982-11-09 1984-05-18 Yaskawa Electric Mfg Co Ltd リニヤステツピングモ−タ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986469A (ja) * 1982-11-09 1984-05-18 Yaskawa Electric Mfg Co Ltd リニヤステツピングモ−タ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12065319B2 (en) 2020-10-29 2024-08-20 Canon Kabushiki Kaisha Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article

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